Research of silicon surface etched in potassium hydroxide solution

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چکیده

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ژورنال

عنوان ژورنال: Izvestiâ vysših učebnyh zavedenij. Priborostroenie

سال: 2018

ISSN: 0021-3454

DOI: 10.17586/0021-3454-2018-61-10-915-921